INFICON launches three extensions for extra environment friendly helium leak detection

Simpler dealing with and sooner outcomes

Leak assessments are important in semiconductor factories and within the manufacture of photo voltaic cells and flat panel shows. Figuring out the smallest leaks with helium leak detection is essential for sustaining the required purity, avoiding defects and in the end for product high quality. To boost the UL household of leak testers, INFICON has subsequently launched the three clever additions SMART-Spray, I·BOOST and SPRAY-Examine. The specialist in measurement know-how, sensor know-how and management software program thus ensures simpler dealing with, sooner response instances, shorter check cycles and extra dependable measurement outcomes.

SMART-Spray: quick, easy and dependable

INFICON is providing a brand new helium spray gun with the SMART-Spray. The hose-bound dealing with of huge helium cylinders and the error-prone adjustment of the spray quantity are a factor of the previous with SMART-Spray. “The helpful gadget, which is designed for over 1,000 sprays per helium filling, replaces a distant management and combines its capabilities with these of a guide helium spray gun,” says Product Supervisor Markus Schwambera, summarising the benefits. Geared up with an illuminated color show, it makes leak detection on complicated semiconductor methods with many check factors and potential leaks simpler. These purposes are characterised by restrict leak charges of lower than 1 x 10-9 mbar x l/s. In these purposes, the battery-operated, moveable gadget makes leak testing extra versatile, less complicated and extra environment friendly.

I·BOOST: brief response time, exact measurement consequence

With the sign processing filter I·BOOST software program replace, INFICON accelerates the leak price sign. This shortens the response and check instances, particularly for the UL3000 Fab and UL6000 Fab sequence, as a result of the check factors may be sprayed at shorter intervals. “The underside line is that this leads to a time saving as much as 50 % in leak detection in all measuring ranges,” says Product Supervisor Markus Schwambera, outlining the leap in effectivity. “Customers who buy the licence obtain sooner and extra exact measurement outcomes for various chamber volumes,” assures Schwambera. The advantages of I·BOOST are additionally notably efficient in complicated semiconductor methods. “The decrease the restrict leakagerates, the longer the check cycles often take – and that is the place the upper sensitivity and time financial savings of I·BOOST have the best impression,” argues Schwambera.

SPRAY-Examine: simple to put in check leak

With the SPRAY-Examine, INFICON provides an easy-to-install check leak. “The device is predicated on quartz home windows which are solely permeable to gentle gases reminiscent of helium and hydrogen. This will increase security and extends the performance of leak detection,” explains Markus Schwambera. SPRAY-Examine permits the measurement set-up and check technique to be checked within the related leak price vary. It may also be hooked up on to the system to hold out dead-time checks. “Generally a sure period of time elapses between the spray shot and the indication on the show,” says Markus Schwambera. This permits customers to higher estimate how lengthy the pause between spraying factors ought to final in order that potential leaks may be clearly assigned. The exclusion process applies: If there is no such thing as a indication after the useless time has elapsed, there is no such thing as a leak. “As a result of SPRAY-Examine is impermeable to gases which are dangerous to the method, reminiscent of water or oxygen, it might additionally stay mounted on the semiconductor system,” explains the product supervisor. Necessary areas of software are methods with restrict leakage charges beneath 10-9 mbar x l/s.

These good necessities can be found worldwide

SMART-Spray, I·BOOST and SPRAY-Examine are appropriate for all cellular INFICON helium leak detectors of the UL household, whereby I·BOOST is restricted to the newest era of UL units (UL3000 Fab/UL6000 Fab sequence). The UL6000 Fab is probably the most highly effective and greatest gadget available on the market for bigger check volumes in fashionable semiconductor factories and coating methods with very giant chamber volumes. It provides the quickest response instances and shortest check instances in all measuring ranges. Its compact design makes it simple to maneuver even in tight areas. The UL3000 Fab sequence was additionally developed for leak detection in semiconductor factories. “It’s characterised by flexibility, mobility, quick commissioning and excessive sensitivity. Customers additionally obtain their exact check outcomes in a short time” and are the usual in fashionable semiconductor factories,” emphasises Product Supervisor Markus Schwambera. The UL3000 Fab additionally requires solely a small footprint and may be simply and maneuvered by slim areas. The UL1000 Fab sequence covers a variety of purposes relating to economical helium vacuum leak assessments in industrial or semiconductor environments – particularly for smaller chamber volumes. The primary benefits: The gadget may be very highly effective, strong and cheap to buy.